{"id":66,"date":"2011-05-26T13:48:03","date_gmt":"2011-05-26T17:48:03","guid":{"rendered":"https:\/\/coefs.charlotte.edu\/hzhang3\/?page_id=66"},"modified":"2026-03-10T16:32:46","modified_gmt":"2026-03-10T20:32:46","slug":"sem-facilities","status":"publish","type":"page","link":"https:\/\/coefs.charlotte.edu\/hzhang3\/sem-facilities\/","title":{"rendered":"Instruments"},"content":{"rendered":"\n<h2 class=\"wp-block-heading has-text-align-center\"><span style=\"font-size: large\"><strong>Scanning Electron Microscopy Lab<\/strong><\/span><\/h2>\n\n\n\n<p class=\"has-text-align-center\"><strong><span style=\"font-size: medium\">(Duke Centennial Hall 240)<\/span><br>\n<\/strong><\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong><span style=\"font-size: medium\">JEOL JSM 6480 Scanning Electron Microscope<\/span><\/strong><\/h2>\n\n\n<div class=\"wp-block-image \">\n<figure class=\"alignright\"><img decoding=\"async\" src=\"https:\/\/coefs.charlotte.edu\/hzhang3\/files\/2011\/05\/SEM-photo.jpg\" alt=\"JEOL JSM 6480 Scanning Electron Microscope\"\/><\/figure>\n<\/div>\n\n\n<ul class=\"wp-block-list\">\n<li>Tungsten hairpin filament.<\/li>\n\n\n\n<li>Spatial resolution at 30 kV of 3 nm for secondary electron image, and 4 nm for backscattered electron image.<\/li>\n\n\n\n<li>Magnification ranging from 8\u00d7 to 300,000\u00d7.<\/li>\n\n\n\n<li>Accelerating voltage adjustable from 0.3 kV to 30 kV.<\/li>\n\n\n\n<li>5-axis sample stage capable of eucentric rotation and tilt.<\/li>\n\n\n\n<li>Maximum 8-inch wafer loadable.<\/li>\n\n\n\n<li>Equipped with Oxford Instruments INCA energy dispersive X-ray spectroscope (EDS) system capable of qualitative analysis (element identification), quantitative analysis (element concentration), and microanalysis (spot analysis, linescan, and areal mapping).<\/li>\n<\/ul>\n\n\n\n<p><a href=\"https:\/\/coefs.charlotte.edu\/hzhang3\/files\/2011\/05\/SEM-sample-preparation-instructions.pdf\">SEM Sample Preparation Instructions<\/a><br><a href=\"https:\/\/coefs.charlotte.edu\/hzhang3\/files\/2011\/11\/JEOL-JSM_manual.pdf\">JEOL JSM 6480 SEM Manual<\/a><br><a href=\"https:\/\/coefs.charlotte.edu\/hzhang3\/files\/2011\/05\/Oxford-EDS-Instruction-Manual.pdf\">Oxford Instruments INCA EDS Manual<\/a><\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>Denton Desk IV-TCS Sputter Coater<\/strong><\/h2>\n\n\n<div class=\"wp-block-image \">\n<figure class=\"alignright\"><img decoding=\"async\" src=\"https:\/\/coefs.charlotte.edu\/hzhang3\/files\/2011\/06\/IMG_3869.jpg\" alt=\"sputter coater\"\/><\/figure>\n<\/div>\n\n\n<ul class=\"wp-block-list\">\n<li>6\u201d OD steel chamber with viewport<\/li>\n\n\n\n<li>2\u201d diameter rotating stage with pre-drilled stub holes<\/li>\n\n\n\n<li>Enhanced touchpad control with graphics capability<\/li>\n\n\n\n<li>60 l\/s turbo molecular pump\\two stage, direct drive, 85 lpm mechanical pump<\/li>\n\n\n\n<li>0-100 mA power supply<\/li>\n\n\n\n<li>Ultimate vacuum of ~5\u00d710<sup>-6<\/sup> torr<\/li>\n\n\n\n<li>Specimens are protected from damage by the anode grid with the magnetron sputterhead to collect stray electrons, preventing them from bombarding\/heating the sample<\/li>\n\n\n\n<li>Capable of sputtering all metals with fine grained films<\/li>\n\n\n\n<li>Carbon evaporation accessories are available for carbon deposition<\/li>\n<\/ul>\n\n\n\n<p><a href=\"https:\/\/coefs.charlotte.edu\/hzhang3\/files\/2011\/11\/Denton-Desk-IV-Sputter-manual.pdf\">Denton Desk IV-TCS Sputter Coater Manual<\/a><\/p>\n\n\n\n<p><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Scanning Electron Microscopy Lab (Duke Centennial Hall 240) JEOL JSM 6480 Scanning Electron Microscope SEM Sample Preparation InstructionsJEOL JSM 6480 SEM ManualOxford Instruments INCA EDS Manual Denton Desk IV-TCS Sputter Coater Denton Desk IV-TCS Sputter Coater Manual<\/p>\n","protected":false},"author":61,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-66","page","type-page","status-publish","hentry"],"jetpack_sharing_enabled":true,"_links":{"self":[{"href":"https:\/\/coefs.charlotte.edu\/hzhang3\/wp-json\/wp\/v2\/pages\/66","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/coefs.charlotte.edu\/hzhang3\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/coefs.charlotte.edu\/hzhang3\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/coefs.charlotte.edu\/hzhang3\/wp-json\/wp\/v2\/users\/61"}],"replies":[{"embeddable":true,"href":"https:\/\/coefs.charlotte.edu\/hzhang3\/wp-json\/wp\/v2\/comments?post=66"}],"version-history":[{"count":6,"href":"https:\/\/coefs.charlotte.edu\/hzhang3\/wp-json\/wp\/v2\/pages\/66\/revisions"}],"predecessor-version":[{"id":913,"href":"https:\/\/coefs.charlotte.edu\/hzhang3\/wp-json\/wp\/v2\/pages\/66\/revisions\/913"}],"wp:attachment":[{"href":"https:\/\/coefs.charlotte.edu\/hzhang3\/wp-json\/wp\/v2\/media?parent=66"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}